| Verfahren zur Herstellung von Mikrosieben (2004) | |||||||||
Abstract | |||||||||
| WO2003091804 A UPAB: 20040102 NOVELTY - Preparation of microhole structures with application of a relief structure to a substrate surface by angular coating, the desired hole pattern of the relief structure is obtained via a continuous network of first surface elements and second ones between them, the local normal surface vectors of the first surface elements forming a small angle with the unit vector and the those of the second ones forming a small angle with the coating direction vector is new. USE - The microhole structures are useful for fine filtration of liquids and for radiation filtration and screening. ADVANTAGE - the method avoids a drawback of the contact exposure method which cannot be applied industrially for hole sizes less than 1 micron. | |||||||||
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