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Laser micromachining of porous anodic alumina film (2007)

Abstract
A laser direct-write process on porous anodic alumina film is carried out for the fabrication of microstructure on the film, using nanosecond, second harmonic Nd:YAG laser. Laser micromachining can be preformed in two different ways on colored and pore-sealed anodic alumina film, to generate microstructures on the film. Removal of the aluminum substrate before laser irradiation greatly improves the shape characteristics of the microstructure. The depth of microstructures can be controlled by the power and the scanning speed of the laser beam. Several structures with depths from 1 to 35 μm were fabricated on anodic alumina film with good precision and reproducibility.

Publication details
Download http://hdl.handle.net/2115/28634
http://dx.doi.org/10.1007/s00339-007-4140-4
Publisher Springer Berlin / Heidelberg
Repository Hokkaido University Collection of Scholarly and Academic Papers (Japan)
Keywords 572
Type article (author version)
Language English