| Combinatorial synthesis of thin mixed oxide films and automated study of their piezoelectric properties (2007) | |||||||||
Abstract | |||||||||
| The development of an automated production of thin films and the characterization of their piezoelectric properties in high-throughput are described. A library of 50 undoped as well as doped lead zirconate titanate Pb(Zr,Ti)O-3 (PZT) coatings was produced by sol deposition. Afterwards, the piezoelectric properties of the library films were analyzed by automated atomic force microscopy employing the ultrasonic piezo-mode. | |||||||||
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