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Micromachined fountain pen for atomic force microscope based nanopatterning (2004)

Abstract
We present a tool that can be used in standard atomic force microscope and that enables chemical, chemical/mechanical, or physical surface modification using continuous liquid supply. The device consists of a reservoir micromachined into the probe support that is connected to fluidic channels embedded in a V-shaped cantilever. Via the fluidic channels, the liquid reaches the tip. The fluid transport to the sample surface is demonstrated and fountain pen lithography applications are presented.

Publication details
Download http://purl.org/utwente/48341
Repository University of Twente (Netherlands)
Type Article / Letter to editor
Relation http://doc.utwente.nl/48341/1/Deladi04microcachined.pdf