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29696787
Adhesive wafer bonding for wafer-level fabrication of microring resonators. (2007)
Dragoi, V.
,
Mittendorfer, G.
,
Thanner, C.
,
Alexe, M.
,
Pintilie, L.
,
Hamacher, M.
,
Heidrich, H.
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http://edoc.mpg.de/350319
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Max Planck Society - eDocument Server (Germany)
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Article