deutsch
english
Publication View
34889164
Fabrication of Uniform Photonic Devices Using 193nm Optical Lithography in Silicon-on-Insulator (2008)
Selvaraja Shankar, K
,
Bogaerts, W
,
Van Thourhout, D
,
Baets, R
Publication details
Download
http://hdl.handle.net/1854/11550
Repository
DSpace at UGent (Belgium)
Type
Proceeding
Language
English