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34897963
Encapsulated micromachined resonant force sensor / (2000)
Haueis, Martin.
Abstract
Im Buchh.: Düsseldorf : VDI-Verlag.. Diss. no. 13983 techn. sc. SFIT Zurich.. Literaturverz.
Publication details
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http://worldcat.org/oclc/82650568
Publisher
[S.l.] : [s.n.],
Repository
OCLC's Experimental Thesis Catalog (United States)
Type
text
Language
eng