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Characterization of inductively-coupled RF plasma sources with multiple low-inductance antenna units (2006)

Publication details

Download	http://hdl.handle.net/2433/35780
Publisher	INST PURE APPLIED PHYSICS
Repository	Kyoto University Research Information Repository (KURENAI) ()
Keywords	large-area plasma, inductively-coupled RF plasma, internal antenna, plasma source
Type	Journal Article
Language	English
Relation	10.1143/JJAP.45.8046