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Negative-ion implantation into thin SiO2 layer for defined nanoparticle formation (2006)

Publication details

Download	http://hdl.handle.net/2433/39814 http://link.aip.org/link/?rsi/77/03A510
Publisher	AMER INST PHYSICS
Repository	Kyoto University Research Information Repository (KURENAI) ()
Type	Journal Article
Language	English
Relation	10.1063/1.2163287