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Si emission from the SiO2/Si interface during the growth of SiO2 in the HfO2/SiO2/Si structure (2006)

Publication details

Download	http://hdl.handle.net/2433/39678 http://link.aip.org/link/?apl/88/153516
Publisher	AMER INST PHYSICS
Repository	Kyoto University Research Information Repository (KURENAI) ()
Type	Journal Article
Language	English
Relation	10.1063/1.2195101