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Effects of substrate materials on self-formation of Ti-rich interface layers in Cu(Ti) alloy films (2007)

Publication details

Download	http://hdl.handle.net/2433/67481
Publisher	MINERALS METALS MATERIALS SOC
Repository	Kyoto University Research Information Repository (KURENAI) (Japan)
Keywords	Cu(Ti) alloy film, self-formation, barrier layer, reaction, resistivity
Type	Journal Article
Language	English
Relation	10.1007/s11664-007-0097-5