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Surface oxidation of Si assisted by irradiation with large gas cluster ion beam in an oxygen atmosphere (2007)

Publication details

Download	http://hdl.handle.net/2433/67594
Publisher	ELSEVIER SCIENCE BV
Repository	Kyoto University Research Information Repository (KURENAI) (Japan)
Keywords	cluster ion bombardment, SIMS, QMS, secondary ion, surface oxidation
Type	Journal Article
Language	English
Relation	10.1016/j.nimb.2006.12.026