| Double layer coating for high resolution low temperature SEM This article is published in The Journal of Microscopy (1995),Vol. 179, pp 229-237. (2007) | |||||||||||||||
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| etching SUMMARY Specimen damage caused by mass loss due to electron beam irradiation is a major limitation in Low Temperature Scanning Electron Microscopy of bulk specimens. At high primary magnifications (e.g. 100 000 x) a hydrated sample is usually severely damaged after one slow scan (about 3000 e nm | |||||||||||||||
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