| SIMULATION OF SEMICONDUCTOR DEVICES AND PROCESSES Vol. 6 Edited by H. Ryssel, P. Pichler- September 1995 A Programmable Tool for Interactive Wafer-State Level Data Processing (2008) | |||||||||||||
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| This paper presents a tool for initial and intermediate data processing at wafer-state level. Geometric operations and analytical attribute calculations are com-bined with the graphical user interface and with some TCAD shell functionality to reduce the effort of both manual editing and automated operations within complex simulation flows. 1. | |||||||||||||
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