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Fully ultrahigh-vacuum-compatible fabrication of submicrometer-spaced electrical contacts. (2006)

Abstract

Review of Scientific Instruments, 77(2006) S.026101/1-3. DOI:10.1063/1.2163973

Publication details

Download	http://opac.fzk.de:81/de/oai_frm.html?titlenr=64325&server=//127.0.0.1&port=81
Repository	KAROLA - OA-Volltextserver des Forschungszentrums Karlsruhe (Germany)
Keywords	520101
Type	ZSI, EM
Language	isi