| Encapsulated micromachined resonant force sensor (2005) | |||||||||
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| Diss ETH ncapsulate resonant force dissertation submitted the SWISS FEDERAL INSTITUTE TEC HNOL OGY ZIJRICH for the degree Doctor Technical Sciences presented MARTIN HAUEIS Dipl Ing IJniv fiir Maschinenbau Universit Karlsruhe born XLt Auwst Jena Germany citizen Germany Accepted the ecol meucfation Prof ual examiner Huser examiner Ziirich XllT There exists strong interest sensing devices which can a static load with very high resolution normal temperatures and elevated temperat uresup sensor with such specifications sought applications oil gging the automotive and the spacecra ftindustry Iii this thesis packaged tnic oInachincc resonant force sensor has been designed with the focus the above mentioned needs The novelty that this sensor all single crystal silicon solution for packaged resonant force sensor resonant force sensor based the effect that the resonance freq uxicy mechanical structure depends its mechanical stiffness The main elements resonant force sensor arc the resonant structure the resonance detection the load coupling and the package The presented force sensor consists single crystal microresonator utilizing the most recent advances microtechnology for its fabrication The resonant structure hermetically VXL Ipackaged single crystal silicon housing together with the resonance detection sensor Two types resonators having electronic and fibre optical resonance detection were developed realizecl and testecl The packaged silicon load cell achieved load sensitivity res | |||||||||
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