Publication View

Role of RF power and gas mixture in some optical and photoluminescence properties of dual-plasma a-C:H films (1998)

Publication details

Download	http://hal.in2p3.fr/in2p3-00003198/en/
Publisher	HAL - CCSd - CNRS
Contributors	Jocelyne Lorgeril
Repository	CCSd/HAL : e-articles server (based on gBUS) (France)
Keywords	Physics/Physics/Instrumentation and Detectors
Type	ARTOUVRAGE