A. Dadgar

Publication List Details

Period

2004 - 2008

Number

10

Co-Authors

Two-dimensional electron gas based actuation of piezoelectric AlGaN/GaN microelectromechanical resonators (2008)

Brueckner, K., NiebelschĂĽtz, F., Tonisch, K., Michael, S., Dadgar, A., Krost, A., ...

Free-standing piezoelectric AlGaN/GaN beam resonators have been prepared on silicon substrates. The two-dimensional electron gas at the interface of the III/V heterostructure has been employed to act...