Enhancement of He-induced cavities in silicon by hydrogen plasma treatment (2005)
L. Liu, C., Ntsoenzok, E., Vengurlekar, A., Ashok, S., Alquier, D., O. Ruault, M., ...
The formation of subsurface nm-size cavities in Si from He implantation followed by thermal anneal involves a complex interaction of He with vacancy clusters. We have attempted to promote cavity...
Enhancement of He-induced cavities in silicon by hydrogen plasma treatment (2005)
L. Liu, C., Ntsoenzok, E., Vengurlekar, A., Ashok, S., Alquier, D., O. Ruault, M., ...
The formation of subsurface nm-size cavities in Si from He implantation followed by thermal anneal involves a complex interaction of He with vacancy clusters. We have attempted to promote cavity...