Wafer bonding - A powerful tool for MEMS (2007)
Bhat, KN, Gupta, Das A, Rao, PRS, Gupta, Das N, Bhattacharya, E, Sivakumar, K, ...
Wafer bonding techniques play a key role in the present day silicon bulk micromachining for MEMS based sensors and actuators. Various silicon wafer bonding techniques and their role on MEMS devices...
Wafer bonding - A powerful tool for MEMS (2007)
Bhat, KN, Gupta, Das A, Rao, PRS, Gupta, Das N, Bhattacharya, E, Sivakumar, K, ...
Wafer bonding techniques play a key role in the present day silicon bulk micromachining for MEMS based sensors and actuators. Various silicon wafer bonding techniques and their role on MEMS devices...