Elizabeth Dobisz

Publication List Details

Period

1998 - 2008

Number

Co-Authors

Hirokazu Hasegawa (1)
Mikihito Takenaka (1)
Satoshi Akasaka (1)
Hiroshi Yoshida (1)
Yasuhiko Tada (1)
Dan Kercher (1)

Directed Self-Assembly of Diblock Copolymer Thin Films on Chemically-Patterned Substrates for Defect-Free Nano-Patterning (2008)

Tada, Yasuhiko, Akasaka, Satoshi, Yoshida, Hiroshi, Hasegawa, Hirokazu, Dobisz, Elizabeth, Kercher, Dan, ...

Anti-Charging Layers for Beam Lithograpghy and Mask Fabrication (1998)

Dobisz, Elizabeth

This invention discloses an anti-charging layer for beam lithography and mask fabrication. This invention reduces beam displacement and increases pattern placement accuracy. The process will be used...