Laser Projection Patterned Processing of Semiconductors. (9999)
Foulon, F., Green, M., Lawes, R. A., Baker, J., Goodall, F. N.
This paper is concerned with laser projection patterned processing of material. We first describe the technique and discuss its limitations and its prospects for utilization in the fabrication of a...
Laser-Projection-Patterned Etching of GaAs in a Chlorine Atmosphere. (1998)
Foulon, F., Green, Mino, Goodall, F. N., De Unamuno, S.
A pulsed KrF laser and deep UV projection optics were used to perform laser-projection-patterened etching of gallium arsenide. The etching process is shown to result from a purely thermochemical...