PZT thick films for sensor and actuator applications (2007)
Gebhardt, S., Seffner, L., Schlenkrich, F., Schönecker, A.
PZT thick films with thicknesses between 5 and 150 mu m are of great interest for microsystems applications where direct coating onto microelectronic substrates and high electromechanical performance...
Development of functional ceramic films for nano- and microsystems (2007)
Schönecker, A., Gebhardt, S., Schlenkrich, F., Endler, I., Meissner, F., Michaelis, A., ...
Ceramic films gain more and more importance for the preparation of integrated functional components in planar design. The required film thickness depends on the design of the envisaged circuit or...
Development of functional ceramic films for nano and microsystems technology (2006)
Schönecker, A., Gebhardt, S., Schlenkrich, F., Endler, I., Mayer-Uhma, T., Uhlig, S.
Ceramic films are considered as key functional material in nano and microsystems technology. IKTS has built the experimental basis for the development of functional films using screen printing, CSD,...
PZT thick films for microsystems applications (2006)
Gebhardt, S., Seffner, L., Schlenkrich, F., Schönecker, A.
The preparation of PZT thick films on various substrates with thicknesses between 5 micron and 150 micron has been an area of active research for the last 15 years. Sintering of such films is...
Kühle, J., Meppelink, J., Otto, A., Schlenkrich, F.
Ziel der Projektes war die Entwicklung eines neuen, multifunktionalen dielektrischen HDK-Werkstoffs mit definierter Temperaturcharakteristik, der komplexe Bauformen von Kondensatoren für den Einbau...
Verfahren zur Herstellung von Dickschichten aus ferroelektrischen Keramiken (2003)
Schlenkrich, F., Seffner, L., Gesemann, H., Schoenecker, A.
DE 19817482 A UPAB: 19991215 NOVELTY - Thick ferroelectric ceramic layers are produced by applying a pure organometallic sol-gel solution, heating, applying a ferroelectric ceramic powder dispersion...
The invention relates to highly reactive metal niobate and/or tantalates of the general formula (Me(II)A
Self-polarization and texture of wet chemically derived lead zirconate titanate thin films (2001)
Frey, J., Schlenkrich, F., Schönecker, A.
A multilayer structure of Si/SiO2/Ti/Pt/TiO2 was used as a bottom electrode for pyroelectric Pb(Zr0.25Ti0.75)O3 (PZT) thin films. A wet chemical approach was used for PZT deposition. The...
Investigation of interlayer phenomena in Ti/Pt electrodes for ferroelectric thin film devices (2001)
Frey, J., Schönecker, A., Schlenkrich, F., Thomas, J., Hermel, W.
The paper deals with the interrelations between prepn. and microstructure of a Si/SiO2/Ti/Pt/TiO2/Pb(Zr,Ti)O3 multilayer configuration. A wet chem. approach was used for Pb(Zr,Ti)O3 (PZT) deposition...
Experimental study of texture and self-polarization of sol-gel derived PZT thin films (2000)
Frey, J., Schlenkrich, F., Schönecker, A., Obenaus, P., Thomas, J., Köhler, R.
Gesemann, H.J., Seffner, L., Schoenecker, A., Schlenkrich, F.
A novel ferroelectric ceramic material comprises a ceramic perovskite solid soln. contg. one or more group 1 and 2 components, the group 1 components being: PbTiO3 (PT), BaTiO3 (BT), Pb(Fe1/2Nb1/2)O3...
Lead perovskites of the formula Pb(B'B'')O3 ÄB': Mg, Zn, Ni, Co, Fe; B'': Nb, W, TaÜ were synthesized by different wet chemical methods, the classical mixed oxide route and a modified ceramic...
Complex lead perovskites with nominal compositions Pb(B'B'')O3 ÄB': Mg, Zn, Ni, Co, Fe; B'': Nb, W, TaÜ are very important materials for dielectric and electrostrictive applications. The properties...
Mixtures of ferroelectric and paraelectric materials offer the possibility to develop materials with temperature directed coefficient of capacity as used in ceramic multilayer capacitors of type1....
Dielectric properties of load perovskites as a function of processing and precursors (1993)
Investigations about the synthesis of complex lead- perovskites of the formular Pb (B'B'')O3 (B': Mg, Zn, Ni, Fe; B'': Nb, Ta, W) were presented. The ceramic procedure being modified by H. C. Starck...