3rd International Symposium on Atomic-layer Epitaxy and Related Surface Processes (1995)
Aoyagi, Yoshinobu, Nishizawa, Jun-ichi, Ozeki, Masashi, Usui, Akira
Adsorbed Layers in the Process of Chemical Vapor Deposition, (1992)
In chemical vapor deposition, surface migration of adsorbed species is an important factor which limit the minimum crystal growth temperature, since high substrate temperature enhances the surface...