M. Ghantasala

Heat treatment effects on the formation of lanthanum-modified lead zirconate titanate thin films (2008)

Kandasamy, S, Ghantasala, M, Holland, A, Li, Y, Bliznyuk, V, Wlodarski, W, ...

The microstructural and compositional properties of lanthanum-modified lead zirconate titanate (PLZT) thin films deposited on platinum coated Si substrates by RF magnetron sputtering have been...

Design and fabrication of a hybrid actuator (2005)

Fu, Y, Ghantasala, M, Harvey, E, Qin, L

The necessity to reduce the size of actuators and at the same time increase the force and the air gap has placed severe constraints on the suitability of current microactuator technology for various...

Study of influence of underlayer on the properties of magnetron sputtered samarium cobalt thin films (2005)

Wang, J, Ghantasala, M, Sood, D, Evans, P

This paper presents the results of the investigation on the deposition and characterization of samarium cobalt (SmCo) thin films. To understand the underlayer effects on the magnetic properties, SmCo...

Characterization of sputtered SmCo thin films for light element contamination using RBS and HIERDA techniques (2004)

Wang, Y, Sood, D, Ghantasala, M, Dytlewski, N

Samariurn cobalt films were prepared on silicon substrates with and without a chromium buffer layer at room temperature and 600degreesC using direct current unbalanced magnetron sputtering. For...

Patterning of SU-8 resist structures using CF4 (2004)

Vora, K, Holland, A, Ghantasala, M, Mitchell, A

Carbon Tetraflouride (CF4) plasma etching condition for SU-8 negative photoresist is characterized for its potential applications in photonics and bioMEMS. The effects of main plasma etching...

Characterization of sputtered SmCo thin films for light element contamination using RBS and HIERDA techniques (2004)

Wang, James Y., Sood, Dinesh K., Ghantasala, M, Dytlewski, Nick

Samarium cobalt films were prepared on silicon substrates with and without a chromium buffer layer at room temperature and 600°C using direct current unbalanced magnetron sputtering. For...

Characterization of sputtered SmCo thin films for light element contamination using RBS and HIERDA techniques (2004)

Wang, James, Sood, Dinesh K., Ghantasala, M, Dytlewski, Nick

Samarium cobalt films were prepared on silicon substrates with and without a chromium buffer layer at room temperature and 600°C using direct current unbalanced magnetron sputtering. For obtaining...

Integration of microfluidic channels and optical waveguides using low-cost polymer microfabrication techniques (2004)

Mitchell, A, Holland, A, Vora, K, Ghantasala, M

Recent progress on the realization of a silicon integrated biophotonic chip using plasma etching and laser ablation is presented. The chip utilizes films of SU-8 and UV-15 polymer material. An...