OPTIMISATION OF SELECTIVE POLYSILICON OXIDATION FOR 0.8µ.m-TECHNOLOGY (1988)
Burmester, R., Kerber, M., Zeller, C.
The dependence of bird's beak length on process parameters has studied for selective polysilicon oxidation. The gate oxide thinning at the field oxide edge is correlated with the voltage drop across...
OPTIMISATION OF SELECTIVE POLYSILICON OXIDATION FOR 0.8µ.m-TECHNOLOGY (1988)
Burmester, R., Kerber, M., Zeller, C.
The dependence of bird's beak length on process parameters has studied for selective polysilicon oxidation. The gate oxide thinning at the field oxide edge is correlated with the voltage drop across...
OPTIMISATION OF SELECTIVE POLYSILICON OXIDATION FOR 0.8µ.m-TECHNOLOGY (1988)
Burmester, R., Kerber, M., Zeller, C.
The dependence of bird's beak length on process parameters has studied for selective polysilicon oxidation. The gate oxide thinning at the field oxide edge is correlated with the voltage drop across...