Ganguli, A, Jarwal, R K, Tarey, R D, Akhtar, M K
This paper presents a detailed study on plasma production using an optimally designed slotted helical antenna, excited by a conical horn, in a mirror machine. For maximizing plasma production...
Hydrogen Profiling and the Stoichiometry of an a-Sin:H Film (1995)
Avasthi, D K, Acharya, M G, Tarey, R D, Malhotra, L K, Mehta, G K
The stoichiometry of a-SiN, : H films is determined by conventional elastic recoil detection analysis (ERDA) using 90 MeV 58 Ni ions. Hydrogen depth profiling indicated that the non-uniformity in H...
Etching of crystalline and amorphous silicon in CClF3 plasma (1991)
Agrawal, Neeta, Tarey, R D, Chopra, K L
Plasma etching of crystalline and hydrogenated amorphous silicon has been studied in CClF3 gas as a function of pressure and power using a 30 kHz parallel plate plasma-etching system. In contrast to...