G. Rieger, S. Halama, S. Selberherr
This paper presents a tool for initial and intermediate data processing at wafer-state level. Geometric operations and analytical attribute calculations are com-bined with the graphical user...
S. Selberherr, F. Fasching, C. Fischer, S. Halama, H. Pimingstorfer, H. Readt, ...
A new TCAD system is presented which is capable of performing complex development tasks by means of a powerful interaction language and an efficient database system. The integration of tools is...