S. Tsukimoto

Fabrication of Cu(Ti) alloy interconnects with self-formation of thin barrier metal layers using a high-pressure annealing process (2007)

Tsukimoto, S., Onishi, T., Ito, K., Konno, M., Yaguchi, T., Kamino, T., ...

Effects of substrate materials on self-formation of Ti-rich interface layers in Cu(Ti) alloy films (2007)

Ito, K., Tsukimoto, S., Kabe, T., Tada, K., Murakami, M.

Role of interface layers and localized states in TiAl-based ohmic contacts to p-type 4H-SiC (2007)

Gao, M., Tsukimoto, S., Goss, S. H., Tumakha, S. P., Onishi, T., Murakami, M., ...

Effect of annealing ambient on the self-formation mechanism of diffusion barrier layers used in Cu(Ti) interconnects (2007)

Tsukimoto, S., Kabe, T., Ito, K., Murakami, M.

Electrical resistivity of polycrystalline Cu interconnects with nano-scale linewidth (2006)

Shimada, M, Moriyama, M, Ito, K, Tsukimoto, S, Murakami, M

Epitaxial growth of GaN layers on metallic TiN buffer layers (2006)

Uchida, Y, Ito, K, Tsukimoto, S, Ikemoto, Y, Hirata, K, Shibata, N, ...

Effects of Al ion implantation to 4H-SiC on the specific contact resistance of TiAl-based contact materials (2006)

Ito, K, Tsukimoto, S, Murakami, M

Grain growth mechanism of Cu thin films (2005)

Murakami, M, Moriyama, M, Tsukimoto, S, Ito, K

Simultaneous formation of p- and n-type ohmic contacts to 4H-SiC using the ternary Ni/Ti/Al system (2005)

Tsukimoto, S, Sakai, T, Onishi, T, Ito, K, Murakami, M

The effect of target purities on grain growth in sputtered copper thin films (2005)

Moriyama, M, Morita, T, Tsukimoto, S, Shimada, M, Murakami, M

Growth of GaN on nitriding TiN buffer layers (2005)

Watanabe, T, Ito, K, Tsukimoto, S, Ushida, Y, Moriyama, M, Shibata, N, ...

Electroless nickel plating onto minute patterns of copper using Ti(III) redox couple (2005)

Yagi, S, Murase, K, Tsukimoto, S, Hirato, T, Awakura, Y

Formation of ti diffusion barrier layers in thin Cu(Ti) alloy films (2005)

Tsukimoto, S, Morita, T, Moriyama, M, Ito, K, Murakami, M

Development of electrode materials for semiconductor devices (2005)

Murakami, M, Koide, Y, Moriyama, M, Tsukimoto, S

A comparative study of the growth of Cr on (110)TiO2 rutile, (0001)α-Al2O3 and (100) SrTiO3 surfaces (2004)

Wagner,T., Fu,Q., Winde,C., Tsukimoto,S., Phillipp,F.

A comparative study of the growth of Cr on (110) TiO2 rutile, α(0001)-Al2O3 and (100)SrTiO3 surfaces (2004)

Wagner,T., Fu,Q., Winde,C., Tsukimoto,S., Phillipp,F.

A comparative study of the growth of Cr on (110)TiO2 rutile, (0001)α-Al2O3 and (100) SrTiO3 surfaces (2004)

Wagner, T., Fu, Q., Winde, C., Tsukimoto, S., Phillipp, F.

A comparative study of the growth of Cr on (110) TiO2 rutile, α(0001)-Al2O3 and (100)SrTiO3 surfaces (2004)

Wagner, T., Fu, Q., Winde, C., Tsukimoto, S., Phillipp, F.

Correlation between the electrical properties and the interfacial microstructures of TiAl-based ohmic contacts to p-type 4H-SiC (2004)

Tsukimoto, S, Nitta, K, Sakai, T, Moriyama, M, Murakami, M

Electrical properties and microstructure of ternary Ge/Ti/Al ohmic contacts to p-type 4H-SiC (2004)

Tsukimoto, S, Sakai, T, Murakami, M

Size dependence of the contact angle of Bi liquid clusters supported on SiO (2004)

Tsukimoto, S, Arai, S, Saka, H

Ternary TiAlGe ohmic contacts for p-type 4H-SiC (2004)

Sakai, T, Nitta, K, Tsukimoto, S, Moriyama, M, Murakami, M

Microstructure of amorphous tantalum nitride thin films (2004)

Tsukimoto, S, Moriyama, M, Murakami, M

Effect of organic additives on formation and growth behavior of micro-void in electroplating copper films (2004)

Moriyama, M, Konishi, S, Tsukimoto, S, Murakami, M

The effect of strain distribution on abnormal grain growth in Cu thin films (2004)

Moriyama, M, Matsunaga, K, Morita, T, Tsukimoto, S, Murakami, M

Texture of MBE grown Cr films on α-Al2YO3 (0001): The occurence of Nishiyama-Wassermann(NW) and Kurdjumov-Sachs (KS) related orientation relationships (2003)

Tsukimoto,S., Phillipp,F., Wagner,T.

Advances in EELS spectroscopy by using new detector and new specimen preparation technologies (2003)

Scheu,C., Gao,M., Van Benthem,K., Tsukimoto,S., Schmidt,S., Sigle,W., ...

Texture of MBE grown Cr films on α-Al2YO3 (0001): The occurence of Nishiyama-Wassermann(NW) and Kurdjumov-Sachs (KS) related orientation relationships (2003)

Tsukimoto,S., Phillipp,F., Wagner,T.

Texture of MBE grown Cr films on α-Al2YO3 (0001): The occurence of Nishiyama-Wassermann(NW) and Kurdjumov-Sachs (KS) related orientation relationships (2003)

Tsukimoto, S., Phillipp, F., Wagner, T.

Advances in EELS spectroscopy by using new detector and new specimen preparation technologies (2003)

Scheu, C., Gao, M., Van Benthem, K., Tsukimoto, S., Schmidt, S., Sigle, W., ...

Texture of MBE grown Cr films on α-Al2YO3 (0001): The occurence of Nishiyama-Wassermann(NW) and Kurdjumov-Sachs (KS) related orientation relationships (2003)

Tsukimoto, S., Phillipp, F., Wagner, T.

High-resolution in-situ transmission electron microscopy observation of a solid-liquid interface in the Al-Si system (1999)

Arai, S., Tsukimoto, S., Miyai, H., Saka, H.

A solid-liquid interface in the Al-Si system has been observed at near-atomic resolution by in-situ heating experiments inside transmission electron microscopes. The solid Si/alloy liquid of Al(-Si)...