Ukah, C. I., Meh, R., Zukotynski, S., Kruzelecky, R. V., Chakrabarti, A.
High-quality silicon nitride films have been deposited onto a variety of substrates including c-Si, GaAs, and InP by the dc glow-discharge decomposition of silane-nitrogen mixtures in a saddle-field...
Separata de: Phys. Stat. Sol 9, pp.549-553, 1965