Sun Ming

Publication List Details

Period

1990 - 2007

Number

5

Co-Authors

Study on the Effect of Nano-SiO2 in ULSI Silicon Substrate Chemical Mechanical Polishing Process (2007)

Liu Yuling, Wang Juan, Sun Ming, Liu Chenglin

Both process and mechanical of silicon substrate chemical mechanical polishing (CMP) are studied in detail, and the effects of experiments designed indicate that nano-SiO2 grinding particles seem to...

Molecular characterization of a DNA fragment harboring the replicon of pBMB165 from Bacillus thuringiensis subsp. tenebrionis (2006)

Huang Junyan, Guo Suxia, Mahillon Jacques, Wang Li, Han Dongmei, ...

Abstract Background Bacillus thuringiensis belongs to the Bacillus cereus sensu lato group of Gram-positive and spore-forming bacteria. Most isolates of B. thuringiensis can bear many endogenous...

Study on the Effect of Nano-SiO2 in ULSI Silicon Substrate Chemical Mechanical Polishing Process (2006)

Liu Yuling, Wang Juan, Sun Ming, Liu Chenglin

Both process and mechanical of silicon substrate chemical mechanical polishing (CMP) are studied in detail, and the effects of experiments designed indicate that nano-SiO2 grinding particles seem to...