ION-SENSITIVE FIELD-EFFECT TRANSISTORS WITH INORGANIC GATE OXIDE FOR PH SENSING (1982)
Akiyama, Tatsuo, Ujihiar, Yusuke, Okabe, Yoichi, Sugano, Takuo, Niki, Eiji
Ion-sensitive fieldeffect transistors (ISFET’s) have been fabricated by using silicon fiims on sapphire substrates (SOS). Using this structure Si02, Zr02, and TazO5 films are examined as...