Aufbau- und Verbindungstechnik für thermoelektrische Generatoren (2009)
Stelter, M., Kusnezoff, M., Partsch, U.
New thermoelectric materials and the operation of thermoelectric generators at temperatures above 250°C lead to new challenges in the device and system integration. In addition to the optimization...
Actuators to be integrated in low temperature cofired ceramics (LTCC) microfluidic systems (2009)
Klumbies, H., Partsch, U., Goldberg, A., Gebhardt, S., Keitel, U., Neubert, H.
LTCC technology has recently been used for microfluidic elements, e.g. channels, cavities and other passive fluidic components. However, microfluidic systems having enhanced functionality, e.g....
Dietrich, S., Kretzschmar, C., Partsch, U., Rebenklau, L.
For RuO(sub 2)-based thick film resistors used in high-sensitivity and -reliability strain gauges, crucial quality indicator besides long-term stability is the effective signal-to-noise ratio, which...
Neubert, H., Partsch, U., Fleischer, D., Gruchow, M., Kamusella, A., Pham, T.Q.
State of the art in mechanical elements of MEMS in LTCC-technology are diaphragms and beams, e.g. for force and pressure sensors. These elements perform small strains and small deformations under...
Generation of via holes and patterns in green foils for multilayer ceramics (2008)
Multilayer ceramics technology uses unsintered (green) ceramic foils to build up multilayer microcircuits and microsystems. Theses foils serve as carrier for screen printed circuitry and later, after...
LTCC-based sensors for mechanical quantities (2007)
Partsch, U., Gebhardt, S., Arndt, D., Georgi, H., Neubert, H., Fleischer, D., ...
LTCC (Low Temperature Co fired Ceramic) is a ceramic multilayer technology for the manufacturing of highly integrated, reliable, high frequency suited, high temperature stable 3-D electronic...
Development of micro-integrated sensors and actuators based on PZT thick films (2007)
Gebhardt, S.E., Rödig, T., Partsch, U., Schönecker, A.J.
Al2O3, Silicon (Si) and Low Temperature Co-fired Ceramics (LTCC) are key functional materials, forming the substrate basis for microsystems technologies. They allow for three dimensional component...
A new concept for LTCC-based pressure sensors (2007)
Partsch, U., Arndt, D., Georgi, H.
A new type of a LTCC-based pressure sensor was presented. It bases on a new design principle consisting the fully mechanical decoupling of the sensor cell from outer mechanical stress and the...
A charging unit based on micro-PEM-fuel cells in LTCC technology (2007)
Goldberg, A., Partsch, U., Stelter, M.
The LTCC (Low Temperature Cofired Ceramic) technology offers the possibility to intergrate passive and active components for fluidic and electronic systems on one 3D substrate carrier. Because of the...
Integrierte Drucksensoren in keramischer Multilayerbauweise (2007)
Partsch, U., Georgi, H., Arndt, D.
LTCC (Low Temperature Cofired Ceramic) ist eine vielfach angewandte Mikrotechnologie zur Herstellung von hochintegrierten, zuverlässigen, HF- geeigneten und temperaturstabilen Mehrlagensubstraten...
Schönecker, A., Gebhardt, S., Partsch, U.
WO 2009049613 A2 UPAB: 20090514 NOVELTY - The element has a sintered piezoelectric or electrostrictive component (2) completely surrounded by a low temperature co-fired ceramic (LTCC), where the...
LTCC-based micro-scale PEM fuel cell (2006)
Partsch, U., Goldberg, A., Stelter, M.
LTCC (low temperature cofired ceramics) is well-known as a technology for the production of highly integrated ceramic microelectronic packages. Furthermore LTCC offers the possibility to integrate...
Keramische Drucksensoren und Verfahren zu ihrer Herstellung (2006)
DE 102006018049 A1 UPAB: 20071113 NOVELTY - The sensor has a carrier, which is formed from several ceramic foils (n), where the foils form a cavity, which is covered with a ceramic pressure membrane...
DE 102006025098 A1 UPAB: 20071217 NOVELTY - The sensor has a ceramic multilayer structure (1) arranged on two ferromagnetic cores (3a, 4a) with metallic windings (3b, 4b) that partially surround over...
Niedertemperaturbrennstoffzelle in LTCC-Technik (2005)
Eine Technologie zur Herstellung LTCC-basierter PEMFC wurde entwickelt. Dafür wurde eine Reihe technologischer und werkstoffwissenschaftlicher Fragestellungen bearbeitet, die der Strukturierung der...
Verbundkoerper und Verfahren zu dessen Herstellung (2004)
Guenther, H., Kretzschmar, C., Partsch, U., Otschik, P.
DE 10247618 A UPAB: 20040527 NOVELTY - The compound body has base body that is made of a precipitation-hardened steel and an applied heating coating. The steel is a high-alloyed steel and the base...
Pressure detection with a resonance method (2003)
Partsch, U., Arndt, D., Otschik, P.
A new principle for pressure measurements is presented. It bases on the shifting of the resonance frequency of a diaphragm by mech. stress e.g. pressure. The diaphragm structure can be made easily by...