Roessler, G., Laube, T., Brockmann, C., Kirschkamp, T., Mazinani, B., Görtz, M., ...
PURPOSE. Visual sensations in patients with blindness and retinal degenerations may be restored by electrical stimulation of retinal neurons with implantable microelectrode arrays. A prospective...
HYPER-IMS: A fully implantable blood pressure sensor for hypertensive patients (2009)
Gräfe, M., Göttsche, T., Osypka, P., Görtz, M., Fassbender, H., ...
Hypertension and heart failures were and are increasingly two of the main diseases of modern population. As a powerful tool for long-term post surgical evaluation of heart pressure, body temperature...
Implants for epiretinal stimulation of retinitis pigmentosa patients (2009)
Görtz, M., Koch, C., Mokwa, W., Walter, P.
This work reports upon the development of a wireless epiretinal implant system (EPI-RET-3) to restore vision by stimulating the retinal ganglion cells of blind Retinitis Pigmentosa (RP) patients....
Fully implantable blood pressure system: Implantation experiences (2009)
Urban, U., Fassbender, H., Fürst, P., Göttsche, T., Bender, B., Becker, R., ...
Hypertension is an important risk factor for vascular diseases (arteriosclerosis), renal and heart insufficiency. In Germany, approximately 10 million people suffer from hypertension. 10% of the...
Intraocular epiretinal prosthesis to restore vision in blind humans (2008)
Mokwa, W., Görtz, M., Koch, C., Krisch, I., Walter, P.
Visual sensations in blind patients suffering from retinal degenerations may be restored by electrical stimulation of retinal neurons using implantable microelectrode arrays. The EPI-RET-3 project...
Fabrication and assembly techniques for a 3rd generation wireless epiretinal prosthesis (2008)
Koch, C., Fassbender, H., Nolten, U., Görtz, M., Mokwa, W.
This paper presents the fabrication and assembly techniques of the EPI-RET-3 wireless retina implant, a medical microsystem for the electrical stimulation of the retina of the blind people suffering...
Fully implantable blood pressure sensor for hypertonic patients (2008)
Fassbender, H., Mokwa, W., Görtz, M., Urban, U., Schmitz-Rode, T., ...
In Germany approximately ten million people suffer from high blood pressure. About 1% of these patients can hardly be stabilized on drugs and a long time monitoring is advisable. A system consisting...
First results of a study on a completely implanted retinal prosthesis in blind humans (2008)
Koch, C., Görtz, M., Walter, P., Mokwa, W.
A wireless epiretinal retina implant sytem, capable of stimulating the retinal ganglion cells in blind Retinitis Pigmentosa (RP) patients, was developed. The prosthesis itself is completely implanted...
Koch, C., Görtz, M., Mokwa, W.
This contribution is related to the EPIRET3 Project, which aims at the development of a wireless intraocular retina implant system for patients suffering from Retinitis Pigmentosa. The specific...
Production processes and applications for the passive alignment of microcomponents (2006)
Brecher, C., Lange, S., Peschke, C., Weinzierl, M., Spanier, G., Mokwa, W.
Research into structural elements for the passive alignment of microcomponents is an essential part of the framework of the collaborative research center 440 (SFB 440). For this purpose, V-groove...
Intravascular pressure monitoring system (2004)
Schnakenberg, U., Krüger, C., Pfeffer, J.G., Mokwa, W., Bögel, G. Vom, Günther, R., ...
Development and functional test of an epiretinal prosthesis (2003)
Krisch, I., Görtz, M., Mokwa, W., Hosticka, B.J.
This work presents the architecture, the realization, and the packaging of a micro implantable visual prosthesis system. Our epi-retinal implant system stimulates the ganglion cells of the outermost...
Retina implantate - zum Stand der Forschung in Deutschland (2003)
Laube, T., Mokwa, W., Müller-Kämpf, S., Richter, H.A., Schanze, T., Schnakenberg, U., ...
Vascular capsule for telemetric monitoring of blood pressure (2003)
Schmitz-Rode, T., Schnakenberg, U., Pfeffer, J.G., Piroth, W., Bögel, G. Vom, Mokwa, W., ...
PURPOSE: Development and experimental evaluation of an intravascular monitoring system for telemetric measurement of blood pressure and heart rate. MATERIALS AND METHODS: The monitoring system...
This paper describes the development and characterization of CMOS compatible surface micromachined capacitive differential pressure sensors with monolithic integrated electronics. Results from...
Intravascular pressure monitoring system (2002)
Krüger, C., Pfeffer, J.G., Mokwa, W., Bögel, G. Vom, Günther, R., Schmitz-Rhode, T., ...
Monitoring of blood pressure and pulse rate offers diagnostical and therapeutical opportunities in hypertension disease and arrhythmia, respectively. This paper presents an intravascular pressure...
Intravascular pressure monitoring system (2002)
Schnakenberg, U., Krüger, C., Mokwa, W., Bögel, G. Vom, Günther, R., ...
Monitoring of blood pressure offers diagnostical and therapeutical possibilities in hypertension decease. The determination of pulse rate is comfortable for detection of arrhythmia or blood sugar for...
Transponder system for non-invasive measurement of intravascular pressure (2002)
Schnakenberg, U., Krüger, C., Pfeffer, J.G., Mokwa, W., Bögel, G. Vom, Günther, R., ...
Monitoring of blood pressure and pulse rate offers diagnostical and therapeutical opportunities in hypertension disease and arrhythmia, respectively. This paper presents an intravascular pressure...
Ullerich, S., Mokwa, W., Bögel, G. Vom, Schnakenberg, U.
A miniaturised and foldable transponder system consisting of a chip and a micro coil for measuring intraocular pressure continously is presented. Investigations for design optimisation of the micro...
A programmable intraocular CMOS pressure sensor system implant (2001)
Stangel, K., Kolnsberg, S., Hammerschmidt, D., Hosticka, B.J., Mokwa, W.
In this paper we present a programmable intraocular pressure sensor system implant integrated on a single CMOS chip. It contains on-chip micromechanical pressure sensor array, a temperature sensor,...
Köster, O., Schuhmann, W., Vogt, H., Mokwa, W.
Miniaturised amperometric transducers have been realised on silicon wafers integrating a disk ultra-microelectrode array as working electrodes, a large counter electrode and a Ag/AgCl pseudo...
Micro-transponder systems for medical applications (2001)
The low power consumption of CMOS electronics with on-chip cointegrated sensors or actuators make it ideal for use in implanted systems that need a very low power consumption. Three examples are...
Köster, O., Knier, M., Kappert, H., Schmidt, M., Mokwa, W.
This paper introduces a noval familiy of monolithic integrated surface micromachined pressure sensors with both linearization and temperature compensation done on-chip. All sensor parameters are...
Köster, O., Schuhmann, W., Vogt, H., Mokwa, W.
A monolithic integrated potentiostat supporting both two- and three-electrode measurement techniques has been previously developed. Due to the fabrication of the potentiostat in a standard CMOS...
A programmable intraocular CMOS pressure sensor system implant (2000)
Stangel, K., Kolnsberg, S., Hammerschmidt, D., Hosticka, B.J., Mokwa, W.
In this contribution we present a programmable intraocular pressure sensor system implant integrated on a single CMOS chip. It contains on-chip micromechanical pressure sensor array, a temperature...
Micro implantable visual prostheses (2000)
Schwarz, M., Ewe, L., Hijazi, N., Hosticka, B.J., Huppertz, J., Kolnsberg, S., ...
Two micro implantable visual prosthesis systems for blind patients will be described. The first system is a retina implant which is based on an implantable microelectrostimulator applicable for...
Micro coils for an advanced system for measuring intraocular pressure (2000)
Ullerich, S., Mokwa, W., VomBögel, G., Schnakenberg, U.
A miniaturised transponder system consisting of a chip and a micro coil for measuring intraocular pressure continuously is presented. The system will be integrated in the haptic of a soft artificial...
Development of a completely encapsulated intraocular pressure sensor (2000)
Walter, P., Schnakenberg, U., VomBögel, G., Ruokonen, P., Krüger, C., Dinslage, S., ...
A completely encapsulated intraocular pressure (IOP) sensor equipped with telemetric signal and energy transfer is introduced integrated into a silicone disc for implantation into the eye. After...
CMOS microtransceivers in ophthalmology (2000)
Kolnsberg, S., Stangel, K., Hammerschmidt, D., Schwarz, M., Hosticka, B.J., Ewe, L., ...
Transceivers serve to receive and transmit various transponder data, such as identification or sensory information, using mainly RF links. An interesting category are transponders that extract their...
Köster, O., Schuhmann, W., Vogt, H., Mokwa, W.
Miniaturised amperometric transducers have been realised on silicon wafers integrating a disk ultra-microelectrode array as working electrodes, a large counter electrode and a Ag/AgCl pseudo...
Single chip CMOS imagers and flexible microelectronic stimulators for a retina implant system (2000)
Schwarz, M., Ewe, L., Hauschild, R., Hosticka, B.J., Huppertz, J., Kolnsberg, S., ...
We are presenting CMOS image sensors and a microelectronic stimulator for realization of a retina implant system that will provide visual sensations using electrostimulation to patients suffering...
1% genaue Absolutdrucksensorfamilie mit zweidimensionaler Kalibration (2000)
Weiler, D., Machul, O., Hammerschmidt, D., Amelung, J., Hosticka, B.J., Mokwa, W.
In diesem Beitrag wird eine monolithisch integrierte Absolutdrucksensorfamilie mit "on-chip" oberflächenmikromechanischem kapazitivem Drucksensorelement, Sensorauslese, Linearisierung und...
Knier, M., Köster, O., Kappert, H., Schmidt, M., Mokwa, W.
This paper introduces a noval family of monolithic integrated surface micromachined pressure sensors with both linearization and temperature compensation done on-chip. All sensor parameters are fully...
STROEMUNGSSENSORKOMPONENTE (2000)
Kersjes, R., Mokwa, W., Zimmer, G., Vogt, H.
A flow sensor component has heat insulating material-filled trenches (14) extending through a single crystal silicon membrane (10) to define thermally isolated regions which are provided with heating...
Initial investigations on systems for measuring intraocular pressure (2000)
Schnakenberg, U., Walter, P., Bögel, G. Vom, Krüger, C., Lüdtke-Handjery, H.C., Richter, H.A., ...
Basic investigations on an intraocular implant system for continuous measurements of the intraocular pressure (IOP) are introduced. The system consists of a pressure sensor connected to transponder...
Surface micromachined high temperature pressure sensors on SIMOX-substrates (1999)
Kasten, K., Amelung, J., Mokwa, W.
A new capacitive single chip pressure sensor for high temperature applications using SIMOX (Separation by IMplantation of OXygen) substrates is presented. The production steps are CMOS-compatible and...
MIKROSYSTEM UND VERFAHREN ZUM HERSTELLEN EINES MIKROSYSTEMS (1999)
Trieu, H.K., Mokwa, W., Ewe, L.
NOVELTY - The microsystem has a flexible foil (12), a number of semiconducting elements (14) embedded in the foil and at least one connecting line (16) essentially mounted on the foil for...
Implantable microdevices (1999)
This paper concentrates on recent developments in the field of implantable sensor and actuator systems. As examples for sensing systems the measurement of the intraocular pressure by an implanted...
Basic investigations on a system for measuring intraocular pressure (1999)
Schnakenberg, U., Walter, P., VomBögel, G., Krüger, C., Lüdtke Handjery, H.C., Richter, H. A., ...
Investigations on an intraocular implant system for continuous measurements of intraocular pressure are introduced. In a first version the system consists of a miniaturised pressure sensor, which is...
Single-Chip CMOS Potentiostat für amperometrische chemische Sensoren (1998)
Köster, O., Mokwa, W., Kakerow, R.
In den letzten Jahren sind enorme Fortschritte vor allem bezüglich des Miniaturisierungsgrades elektrochemischer Sensoren erzielt worden. Die Miniaturisierung der Transducer hat im allgemeinen eine...
Silicon microsystems: merging sensors, circuits and systems (1998)
While the electronic properties of silicon are widely utilized in high-volume IC manufacturing, the use of its mechanical as well as its other properties is still lagging behind. Recent advances in...
On-chip microsystems for medical applications (1998)
Due to the process in semiconductor technology in the last years, silicon devices are available having a very high functionality and complexity. CMOS has become the standard technology for highest...
A microstructured silicon substrate for low power multi gas sensor applications (1998)
Multi gas sensor systems are often the only way for increasing selectivity of a gas measurement in a given environment. It is known that the cycled heating of sensor membranes give the possibility...
Integrated surface micromachined pressure sensor for high pressure applications (1998)
Dudaicevs, H., Hell, S., Mokwa, W., Schmidt, M.
This paper presents what we believe the first monolithic integrated sensor device ready to fit in industrial high pressure application. The integrated sensor device is fabricated with surface...
A generalized model describing corner undercutting by the experimental analysis of TMAH/IPA (1998)
Up to now the etch fronts developed in anisotropic wet chemical etching by undercutting at convex corners have been assumed to be straight and correlated to some special defined fast etching crystal...
A generalized model describing corner undercutting by the experimental analysis of TMAH/IPA (1998)
Up to now the etch fronts developed in anisotropic wet chemical etching by undercutting at convex corners have been assumed to be straight and correlated to some special defined fast etching crystal...
Flexible silicon structures for a retina implant (1998)
Ewe, L., Mokwa, W., Schwarz, M., Hosticka, B.J.
Worldwide there are some different approaches toward the development of a retina implant as a visual prosthesis for people suffering from retinitis pigmentosa (RP). In this work we present an...
Schwarz, M., Ewe, L., Hauschild, R., Hosticka, B.J., Huppertz, J., Kneip, T., ...
This contribution describes the realization of microelectronic components for a retina implant system that will provide visual sensations to patients with photoreceptor degeneration by applying...
Silicon thin film sensor for measurement of dissolved oxygen (1997)
Wittkampf, M., Cammann, K., Rospert, M., Mokwa, W.
A Clark-type oxygen sensor based on a silicon thin film transducer is constructed. Onto the chip a micromachined wafer is attached to form a compartment for the internal electrolyte, which is covered...
Frebel, H., Cammann, K., Kakerow, R., Rospert, M., Mokwa, W.
In this work a microelectrode array was used to develop a multianalyte sensor. Glucose, L-lactate and uric acid were chosen as model analytes. The array consists of ten groups of 40 microelectrodes...
Microsensor techniques for cardiovascular systems (1997)
Progress in semiconductor technology has been very fast in the last few years. One important fabrication process is the CMOS (Complementary metal oxide semiconductor) process. This technology has...
A generalized model describing corner undercutting by the experimental analysis of TMAH/IPA (1997)
Up to now the etch fronts developed in anisotropic wet chemical etching by undercutting at convex corners have been assumed to be straight and correlated to some special defined fast etching crystal...
Silicon thin film sensor for measurement of dissolved oxygen (1996)
Wittkampf, M., Chemnitius, G., Cammann, K., Rospert, M., Mokwa, W.
A Clark-type oxygen sensor based on a silicon thin film transducer is constructed. Onto the chip a micromachined wafer is atached to form a compartment for the internal electrolyte, which is covered...
Results of the development of sensors and myTAS-modules (1996)
Hinkers, H., Conrath, N., Czupor, N., Frebel, H., Hüwel, S., Köckemann, K., ...
Sensors in different silicon technologies and microfluid devices have been developed. They are designed to be integrated in a modular myTAS. All process steps including the biocomponent and...
Novel MOS based sensor system for detection of dissolved hydrogen in transformer oils (1996)
Mokwa, W., Ritter, K., Kean, J.J.
Electrical and thermal over loading of oil filed transformers results in the generation of disolved combustible gase in the oil. This release of H2, CO and hydrocarbons from the oil is an early...
Frebel, H., Chemnitius, G., Cammann, K., Kakerow, R., Rospert, M., Mokwa, W.
In this work a microelectrode array was used to develop a multianalyte sensor. Glucose, L-lactate and uric acid were chosen as model analytes. The array consists of ten groups of 40 microelectrodes...
Liebscher, F.F., Spiegel, E., Manoli, Y., Mokwa, W., Kersjes, R.A.
A silicon flow sensor with integrated electronics for invasive blood flow measurement has been developed and investigated. The flow sensor is based on a silicon-on-insulator SIMOX substrate...
Schwarz, M., Hosticka, B.J., Hauschild, R., Mokwa, W., Scholles, M.
This work describes the architecture and planned realization of components for a retina implant which includes a sensory device for image acquisition, biologically inspired neural nets for modeling...
Compatible CMOS microsystems for automotive and for medical applications (1996)
Integration of sensors and electronics on the same substrate becomes more and more important. CMOS circuit design seems to be the most important technique for the monolithic approach. Compared to...
Meyer, H., Drewer, H., Cammann, K., Kakerow, R., Manoli, Y., Mokwa, W., ...
A monolithic array of 400 individually addressable microelectrodes was fabricated in a modified CMOS process. The platinum electrodes, each 36 µm x 36 µm in size, were arranged in a square matrix...
Sensormatrix zur Bestimmung chemischer und biochemischer Parameter (1995)
Kakerow, R., Manoli, Y., Mokwa, W., Rospert, M., Meyer, H., Drewer, H., ...
Die vorgestellte Sensormatrix in Low-voltage-Technik umfaßt 20x20 einzeln adressierbare Sensorelektroden mit Steuer- und Ausleseelektronik und dient als Substrat für chemische und biochemische...
Schmidt, M., Spiegel, E., Dudaicevs, H., Manoli, Y., Mokwa, W.
A monolithically integrated pressure sensor with on-chip readout electronics for a wide range of applications is presented. The cicuit concept is optmized for a large temperature range...
Die monolithische Integration von Sensorelementen, Sensorelektronik und Schnittstellen auf einem Siliziumsubstrat gewinnt zunehmend an Bedeutung. Im Herstellungsprozeß konventioneller Einzelsensoren...
Monolithisch integrierter Drucksensor mit Ausleseelektronik (1995)
Schmidt, M., Dudaicevs, H., Machul, O., Manoli, Y., Mokwa, W., Spiegel, E.
In diesem Beitrag wird ein kapazitiver Drucksensor mit Ausleseelektronik vorgestellt. Die monolithische Integration des Drucksensors in Oberflächen-Mikroemechanik mit einer Ausleseelektronik basiert...
Mikromechanisches Bauelement und Verfahren zur Herstellung desselben. (1995)
The description refers to a micromechanical component comprising a substrate and a flat deformable element arranged in parallel to the surface of the substrate, the element being equipped with a...
Ein Mikroelektronik-System für fluide Messungen in Blutgefäßen (1995)
Seit Jahrzehnten werden elektrischen Eigenschaften von Silizium in der Massenproduktion von Halbleiter ICs extensiv genutzt. Die physikalischen Eigenschaften des Siliziums können dazu benutzt...
Kalorimetrischer low-cost-Mikrodurchflußmesser für Flüssigkeiten (1995)
Kersjes, R.A., Mokwa, W., Klein. J.
Dieser Beitrag schildert den Aufbau eines kalorimetrischen Massenstrom-Durchflußmessers. Im Gegensatz zu den bisherigen Systemen, welche nach dem thermischen Prinzip arbeiten, weist der...
Liebscher, F.F., Spiegel, E., Manoli, Y., Mokwa, W., Kersjes, R.A.
A silicon flow sensor with integrated electronics for invasive blood flow measurement has been developed and investigated. The flow sensor is based on a silicon-on-insulator SIMOX substrate...
A fully integrated surface micromachined pressure sensor with low temperature dependency (1995)
Dudaicevs, H., Manoli, Y., Mokwa, W., Schmidt, W., Spiegel, E.
The sensor presented here has been developed for the measurement of absolute pressure in the fields of automotive and industrial applications. The integration of the system consists of a pressure...
Temperaturkompensation von Sensorsystemen durch CMOS-Schaltungen (1994)
Hammerschmidt, D., Sprotte, A., Schnatz, F.V., Brockherde, W., Hosticka, B.J., ...
Es werden am Beispiel unterschiedlicher Sensorsysteme (Druck-, Magnetfeld-, Gas-Sensoren) verschiedene, an die Sensoren angepaßte Vorgehensweisen zur Temperaturkompensation erläutert. Die...
Surface micromachined pressure sensors with integrated CMOS read-out electronics (1994)
Dudaicevs, H., Kandler, M., Manoli, Y., Mokwa, W., Spiegel, E.
In this paper a single chip pressure and temperature sensor system with on chip electronics is presented. The capacitive pressure sensor is fabricated using a CMOS process with additional surface...
Silizium - Werkstoff der Mikrosystemtechnik (1994)
Aufgrund des hohen Reinheitsgrads und der Kristallperfektion weist monokristallines Silizium hervorragende mechanische Eigenschaften auf. Der Wert für den Elastizitätsmodul ist vergleichbar zu dem...
Reduction of heat loss of silicon membranes by the use of trench etching techniques (1994)
Werno, J., Mokwa, W., Vogt, H., Kersjes, R.A.
Silicon membranes are widely used for sensor applications because of their mechanical and electrical properties. Because of the high heat conductance of silicon, they are often required for thermal...
A monolithic sensor array of individually addressable microelectrodes (1994)
Kakerow, R., Manoli, Y., Mokwa, W., Rospert, M., Meyer, H., Drewer, H., ...
A monolithic single chip sensor array for measuring chemical and biochemical parameters has been developed and fabricated in a modified standard CMOS process. The array can be used for amperometric...
Kleinste mechanische Elemente für die monolithische Integration in Mikrosystemen (1994)
Aufgrund der planaren Technologie und der ausschließlichen Verwendung von Verfahrensschritten, die auch bei der Herstellung von höchstintegrierten Schaltkreisen eingesetzt werden, erlaubt die...
Integrierbarer, kapazitiver Drucksensor und Verfahren zum Herstellen desselben (1994)
Zimmer, G., Eichholz, J., Mokwa, W., Kandler, M., Manoli, Y.
A process for the manufacture of an integratable, capacitive pressure sensor comprises the following process steps starting with a semiconductor substrate: Applying a spacer layer, depositing a...
Halbleiterbauelement, insbesondere zur Ionendetektion (1994)
Kunath, C., Kurth, E., Kueck, H., Mokwa, W.
The object of the invention is a semiconductor component for the measurement of ion concentrations, in particular and ISFET (ion-sensitive field effect transistor). The semiconductor component...
A CMOS-compatible monolithic conductivity sensor with integrated electrodes (1994)
Kordas, N., Manoli, Y., Mokwa, W., Rospert, M.
A CMOS compatible monolithic single chip system for the measurement of the electrolytic conductivity of human blood has been developed. The chip combines electrodes, current source, amplifier and...
Chemical and biochemical sensor array for two-dimensional imaging of analyte distributions (1994)
Meyer, H., Drewer, H., Krause, J., Cammann, K., Kakerow, R., Manoli, Y., ...
A monolithic sensor chip containing a sensor array of 400 individually addressable platinum microelectrodes has been fabricated. This sensor array can be used in potentiometric mode as well as in...
Array of individually addressable microelectrodes as transducer for enzyme-based sensors. (1994)
Meyer, H., Drewer, H., Krause, J., Cammann, K., Kakerow, R., Manoli, Y., ...
Müller, M., Köhler, R., Gottfried-Gottfried, R., Kück, H., Mokwa, W., Vogt, H.
We report on the application of SIMOX wafers (Separation by Implanted Oxygen) on sensor technologies. Examples for sensors based on the SIMOX technology are presented. A description of a...
Surface micromachined pressure sensors with integrated CMOS read-out electronics (1993)
Dudaicevs, H., Kandler, M., Manoli, Y., Mokwa, W., Spiegel, E.
In this paper a single chip pressure and temperature sensor system with on chip electronics is presented. The capacitive pressure sensor is fabricated using a CMOS process with additional surface...
Silizium-Mikrosysteme für medizinische Anwendungen (1993)
Die physikalischen Eigenschaften des Siliziums können dazu benutzt werden, die unterschiedlichsten Sensorelemente zu realisieren, die auf thermischen, magnetischen, oder optischen Effekten des...
A new microstructured silicon substrate for ultrathin gas-sensitive films (1993)
Schütze, A., Weber, U., Zacheja, J., Kohl, D., Mokwa, W., Rospert, M., ...
Microstructured substrates featuring interdigitated electrodes with a high length-to-width ratio allow the evaluation of thin films with very high sheet resistivity even in environments with large...
Monolithisch integrierbares Sensorsystem zur Messung der elektrolytischen Leitfähigkeit (1993)
Kordas, N., Manoli, Y., Mokwa, W., Rospert, M.
In diesem Beitrag wird ein in CMOS-Technik hergestelltes monolithisches Sensorsystem zur Messung der elektrolytischen Leitfähigkeit vorgestellt, das als Teil eines Multi-Sensor-Systems in der Spitze...
Monolithic single-chip sensor array for two-dimensional imaging of analyte distribution (1993)
Meyer, H., Drewer, H., Krause, J., Cammann, K., Kakerow, R., Manoli, Y., ...
A monolithic sensor array for measuring chemical and biochemical parameters (1993)
Krause, J., Meyer, H., Cammann, K., Kakerow, R., Manoli, Y., Mokwa, W., ...
A monolithic single chip sensor system for measuring chemical and biochemical parameters has been developed and fabricated in a modified standard CMOS-Process. It can be used for amperometric or...
Microelectrode arrays as transducers for chemical and biochemical sensors (1993)
Meyer, H., Naendorf, B., Wittkampf, M., Krause, J., Cammann, K., Kakerow, R., ...
Intelligente Sensorsysteme auf Siliziumbasis (1993)
Sensorsysteme auf Siliziumbasis befinden sich in einem unterschiedlichen Entwicklungsstadium. Mikrosysteme, die rein auf mikroelektronischen Komponenten basieren, werden schon jetzt industriell...
An integrated sensor for invasive blood velocity measurement (1993)
Eichholz, J., Langerbein, A., Manoli, Y., Mokwa, W., Kersjes, R.A.
Invasive measurements of physical parameters in blood are very important for the intensive care. The integrated flow sensors presented here has been developed as a part of an "intelligent catheter"...
Müller, M., Gottfried-Gottfried, R., Kück, H., Mokwa, W.
We report on the use of SIMOX substrates for fabrication or IR radiation thermopiles by CMOS technology. SIMOX technology enables the fabrication of single-crystal leads on thin silicon or silicon...
A fully CMOS compatible infrared sensor fabricated on SIMOX-substrates (1993)
Müller, M., Gottfried-Gottfried, R., Kück, H., Mokwa, W.
We report on the use of SIMOX substrates for fabrication or IR radiation thermopiles by CMOS technology. SIMOX technology enables the fabrication of single-crystal leads on thin silicon or silicon...
Fabrication of sensors and microsystems on SIMOX substrates (1993)
Gottfried-Gottfried, R., Köhler, R., Kück, H., Mokwa, W., Vogt, H.
SIMOX substrates are fabricated by high dose oxygen implantation into the silicon and subsequent high temperature annealing so generating a buried oxide layer. The implantation can be masked,...
Drucksensoranordnung mit einem Drucksensor, einem Referenzelement und einer Messschaltung (1993)
Zimmer, G., Eichholz, J., Mokwa, W., Kandler, M., Manoli, Y.
A pressure sensor arrangement comprising a pressure sensor, a reference element and measurement circuit, attains a high measurement accuracy by the fact that the measurement circuit is a switch...
A CMOS-compatible monolithic conductivity sensor with integrated electrodes (1993)
Kordas, N., Manoli, Y., Mokwa, W., Rospert, M.
A monolithic single chip system for the measurement of the electrolytic conductivity of human blood has been developed. It was designed for medical applications within a heart catheter containing...
Gassel, H., Mokwa, W., Vogt, H.
In this paper it is shown that low dose SIMOX is an efficient etch-stop to fabricate silicon membranes with well defined thickness. Due to the very high selectivity of TMAH as etch solution a four...
Silicon technologies for sensor fabrication (1992)
Progress in semiconductor technology has been very fast in the latest years. Silicon devices are available having a very high functionality and complexity. This progress was only possible by a...
Hosticka, B.J., Mokwa, W., Schöneberg, U., Vogt, H.
Gas-sensitive MOS capacitors with on-chip readout electronics are investigated. The use of these capacitors in combination with switched capacitor circuitry enables a.c. operation of the device to...
Oberflächenmikromechanik für die Herstellung von Silizium-Drucksensoren (1992)
Dudaicevs, H., Kandler, M., Mokwa, W.
In diesem Beitrag werden kapazitive Hochdrucksensoren vorgestellt, die mit dem Verfahren der Silizium-Oberflächenmikromechanik hergestellt werden. Sensoren mit Membrandurchmessern von 26 fm, 30 fm...
A miniature single chip pressure and temperature sensor (1992)
Kandler, M., Manoli, Y., Mokwa, W., Spiegel, E., Vogt, H.
In this paper a single chip pressure and temperature sensor system with on chip electronics for measuring blood pressure and temperature in human arteries is presented. The pressure sensor is...
Mikrosensoren beweisen Stärke. Die neuesten Trends in der Mikrosystemtechnik (1992)
Die Erwartungen an die Mikrosystemtechnik sind gleichbleibend hoch, obwohl heute jedem klar sein sollte, daß der Mikroroboter, der selbstätig Wartungs- und Reinigungsarbeiten durchführen kann,...
Geringes Gewicht, kleinste Abmessungen durch Integration auf kleinstem Raum (1992)
Durch große Forschungsanstrengungen in der Mikroelektronik ist der Kenntnisstand über das Basismaterial für die integrierten Schaltungen, Silizium, sehr hoch. Die technologischen Verfahren und...
Gassensoren auf Siliziumbasis (1992)
Gassensoren auf Basis der Siliziumtechnologie können preiswert in hohen Stückzahlen hergestellt werden. Neben der Möglichkeit der extremen Miniaturisierung können auf dem Siliziumchip neben...
Kandler, M., Manoli, Y., Mokwa, W., Spiegel, E.
A data acquisition system for arterial measurement of blood pressure and temperature is presented. It consists of a planar etched capacitive pressure sensor, a temperature sensor and readout...
Umweltschutz durch Mikroelektronik, Anwendungen, Chancen, Forschungs- und Entwicklungsbedarf (1991)
Hiessl, H., Angerer, G., Mokwa, W.
An effective and realizable environmental policy is dependent not only on the responsible behaviour of each individual, but also on technological innovations. The study shows how the use of...
Hosticka, B.J., Mokwa, W., Schöneberg, U., Vogt, H.
Gas-sensitive MOS capacitors with on-chip readout electronics are investigated. The use of these capacitors in combination with switched capacitor circuitry enables a.c. operation of the device to...
Multisensor catheter for invasive measurement of blood parameters (1991)
Fähnle, M., Eichholz, J., Kandler, M., Kordas, N., Langerbein, A., Manoli, Y., ...
A multisensor catheter for the intravascular measurement of blood parameters is presented. The catheter contains a set of silicon chips that can process the signals of a large number of sensors. This...
Multifunktionaler Herzkatheter (1991)
Eichholz, J., Kandler, M., Kordas, N., Langerbein, A., Manoli, Y., Mokwa, W.
Vorgestellt wird ein System, das die Signale einer großen Anzahl von Sensoren mit integrierter Signalaufbereitung und A/D-Umsetzung verarbeiten kann. Dieses System wird in der intravasalen...
Low-drift gas sensor with on-chip instrumentation (1991)
Hosticka, B.J., Mokwa, W., Schöneberg, U.
Although results on CMOS compatible gas sensors have been published during the recent years, non of them have had on-chip electronic circuitry. In this work a hydrogen gas sensor device with an...
Der intelligente Herzkatheter. Sensoren und Signalvorverarbeitung auf einem Chip (1991)
Während Silizium seit Jahrzehnten als Grundmaterial für elektronische Bauelemente dient, wird es erst seit kurzem auch für miniaturisierte mechanische Präzisionsstrukturen verwendet. Damit lassen...
Drucksensoranordnung mit einem Drucksensor und einem Referenzelement (1991)
Zimmer, G., Eichholz, J., Mokwa, W., Kandler, M., Manoli, Y.
This invention relates to an integratable, capacitive pressure sensor arrangement which comprises a semiconductor substrate and a polycrystalline semiconductor layer defining a pressure sensor cavity...
Gottfried-Gottfried, R., Mokwa, W., Zimmer, G.
The properties of some different magnetic field sensors, fabricated on a 2 fm n-well CMOS process, are discussed. Lateral magnetotransistors sensing magnetic fields parallel and perpendicular to the...
Chemische Festkörpersensoren für Gase (1991)
Kohl, D., Heiland, G., Mokwa, W.
In den letzten 10 Jahren haben Forschung und Entwicklung auf dem Gebiet der chemischen Festkörper-Sensoren einen immer größeren Umfang angenommen. Der folgende Bericht erläutert die Arbeitsweise...
Application of the silicon technology for microsystems in the medical techniques (1991)
Silicon technologies not only allows the fabrication of integrated analog and digital circuitry but also the fabrication of micro sensors for detection of physical and chemical parameters. In this...
Smart silicon system for a multi sensor catheter (1990)
Eichholz, J., Kandler, M., Kordas, N., Langerbein, A., Manoli, Y., Mokwa, W.
A data acquisition system for intravascular measurement of blood parameters is presented. The system consists of a set of silicon chips that can be embedded into a catheter of 2 mm in diameter. It...
Smart CMOS pressure sensor (1990)
Eichholz, J., Kandler, M., Manoli, Y., Mokwa, W.
The fabrication of capacitive pressure sensors using silicon integrated circuit processing is described. The pressure sensors were fabricated using planar etch processing techniques. This results in...
Brockherde, W., Hosticka, B.J., Manoli, Y., Mokwa, W.
Recent developements in silicon technology allow the implementation of nonelectrical functions and CMOS-electronics on the same silicon substrate. Thus microsensors and microactuators can be merged...
New method for achieving very high sensitivities of MOSFET gas sensors (1990)
Dobos, K., Mokwa, W., Zhang, Y., Zimmer, G.
It is known, that by integration of different devices, (like transistors with different cross-sensivities, or diodes for temperature measurement) it is possible to decrease the cross-sensitivity and...
Neural based multi-sensory system (1990)
Hosticka, B.J., Mokwa, W., Richert, P.
In this contribution we present an advanced concept of neural based multi-sensory systems. It realizes two important features: on the one hand the neural net is trained what the sensors are supposed...
Neue Entwicklung in der Mechatronik durch Einsatz der Mikroelektronik (1990)
Der Begriff "Mechatronik" ist aus der Kombination der Wörter "Mechanik" und "Elektronik" entstanden. Dies bedeutet, daß durch die Verknüpfung von mechanischen Elementen mit moderner Elektronik...
Cammann, K., Mokwa, W., Rospert, M.
In this paper the preparation of planar microelectrodes for a Clark-type oxygen sensor on silicon substrates by semiconductor technology is described. Platinum cathodes with diameters down to 1...
Hosticka, B.J., Mokwa, W., Schöneberg, U.
Despite a long period of more than one decade MOS gas sensors are still suffering from long-term instabilities. We present a new way of overcoming some of the problems by incorporating on-chip analog...
A digital output monolithic temperature sensor for invasive applications (1990)
Eichholz, J., Kordas, N., Langerbein, A., Manoli, Y., Mokwa, W.
Measurement of temperature inside the human body is of great importance in many applications. Temperature sensors having small size, good reproducibility and high resolution together with low power...
CMOS-kompatibler Temperatursensor (1990)
Eichholz, J., Kordas, N., Langerbein, A., Manoli, Y., Mokwa, W.
CMOS kompatibler Drucksensor in planarer Ätztechnik mit integrierter Ausleseelektronik (1990)
Eichholz, J., Kandler, M., Manoli, Y., Mokwa, W.
Im vorliegenden Beitrag wird ein kapazitiver Drucksensor vorgestellt, der in der CMOS IC-Technologie gefertigt wird und somit einer entsprechenden Ausleseelektronik auf einem Chip integriert werden...
CMOS compatible capacitive pressure sensor with read-out electronics (1990)
Eichholz, J., Kandler, M., Manoli, Y., Mokwa, W.
The fabrication of capacitive pressure sensors using silicon integrated circuit processing is described. The pressure sensors were fabricated using planar etch processing techniques. This results in...
Capacitive silicon pressure sensor for invasive measurement of blood pressure (1990)
The pressure sensor presented in this paper was developed for invasive measurement of blood pressure. The special requirements for this application are small sensor devices, suitability for a high...
Belz, J., Mokwa, W., Vogt, H., Zimmer, G.
In this work, we report upon a technique for production of single crystal silicon membranes by the use of buried oxide layers as an etch stop. Fabrication starts with a silicon wafer having...
New method for achieving very high sensitivities of MOSFET gas sensors (1989)
Dobos, K., Mokwa, W., Zhang, Y., Zimmer, G.
It is known, that by integration of different devices, (like transistors with different cross-sensivities, or diodes for temperature measurement) it is possible to decrease the cross-sensitivity and...
Intelligenter Herzkatheter (1989)
Eichholz, J., Kandler, M., Kordas, N., Langerbein, A., Manoli, Y., Mokwa, W.
Sensoren und Mikroelektronik (1988)
Der zunehmende Einsatz der Datenverarbeitung zum Messen, Steuern und Regeln in vielen Bereichen, hat zu einem hohen Bedarf an Sensoren geführt. Der Sensor soll möglichst ein Ausgangssignal liefern,...
Sensoren für Umweltgrößen (1988)
Dobos, K., Mokwa, W., Zimmer, G.
Die zunehmende Belastung der Umwelt hat zu einem erhöhten Bedarf an Sensoren für die Überwachung von Umweltgrößen geführt. Hier sei nur der Bereich der Schadstoffüberwachung am Arbeitsplatz...
Dobos, K., Mokwa, W., Vogt, H., Zhang, Y., Zimmer, G., Xiao, G.
Gas sensor based on MOSFET devices with a catalytic active metal gate are well suited for the detection of various gases like hydrogen, ammonia or carbon monoxide. The compatibility of fabricating...
Dobos, K., Mokwa, W., Zimmer, G.
Pd-MOS structures with holes in the gate metal have been prepared for detecting arsine, and investigated in a flow system. The samples show a reversible decrease of threshold voltage on admixtures of...
Der Nachweis von Hydriden mit SnOx-Dünnfilmen unterschiedlicher Schichtdicke (1987)
Für den Nachweis von Arsin wurden SnOx-Dünnfilme unterschiedlicher Schichtdicke präpariert. Die polykristallinen Schichten wurden durch Oxidation von thermisch aufgedampftem Zinn hergestellt und...
Dobos, K., Mokwa, W., Zimmer, G.
Mit Entwicklung von MOS-FET(Metall-Oxyd-Semiconductor-Field-Effect-Transis
Dobos, K., Mokwa, W., Zimmer, G.
Pd-MOS structures with holes in the gate metal have been prepared for detecting arsine, and investigated in a flow system. The samples show a reversible decrease of threshold voltage on admixtures of...