Errors in near-surface and interfacial profiling of boron and arsenic (2004)
Vandervorst, W, Janssens, T, Brijs, B, Conard, T, Huyghebaert, C, Fruhauf, J, ...
Damage accumulation and dopant migration during shallow As and Sb implantation into Si (2003)
Werner, M, Van Den Berg, JA, Armour, DG, Vandervorst, W, Collart, EHJ, Goldberg, RD, ...
The damage evolution and concomitant dopant redistribution as a function of ion fluence during ultra shallow, heavy ion implants into Si have been investigated using medium energy ion scattering...
Advanced characterization of high-k materials: A nuclear approach (2002)
Brijs, B, Huyghebaert, C, Nauwelaerts, S, Caymax, M, Vandervorst, W, Nakajima, K, ...
Loo, R., Meunier-Beillard, P., Vanhaeren, D., Bender, H., Caymax, M., Vandervorst, W., ...
This version is available at the following Publisher URL: http://jap.aip.org
Cluster formation during annealing of ultra-low-energy boron-implanted silicon (2000)
Collart, EJH, Murell, AJ, Foad, MA, Van Den Berg, JA, Zhang, S, Armour, D, ...
The clustering of low-energy ion-implanted boron has been investigated. Two 1 keV boron implantations at doses of 1×1015 and 5×1015 cm2 were annealed for 10 s between 700 and 1100 °C. The...
Investigation of the formation process of MCs+-molecular ions during sputtering (2000)
Vandervorst, W, VLEKKEN, Johan, D'OLIESLAEGER, Marc, KNUYT, Gilbert, DE SCHEPPER, Luc
In secondary ion mass spectrometry, the detection of MCs+ clusters (with M an element of the specimen) under a Cs+ bombardment is frequently used for the quantification of major elements. Despite...
Investigation of the formation process of MCs+-molecular ions during sputtering (2000)
Vandervorst, W, VLEKKEN, Johan, D'OLIESLAEGER, Marc, KNUYT, Gilbert, DE SCHEPPER, Luc
In secondary ion mass spectrometry, the detection of MCs+ clusters (with M an element of the specimen) under a Cs+ bombardment is frequently used for the quantification of major elements. Despite...
Characterization of ultra thin oxynitrides: A general approach (2000)
Brijs, B, Deleu, J, Conard, T, De Witte, H, Vandervorst, W, Nakajima, K, ...
Investigation of the formation of M-2(+)-molecular ions in sputtering processes (1999)
Wu, TD, Vandervorst, W, VLEKKEN, Johan, CROES, Kristof, D'OLIESLAEGER, Marc, KNUYT, Gilbert, ...
The formation process of M-2(+) molecular ions sputtered from elementary target materials is investigated. in a previous article it was shown that these molecules can be used to quantitate major...
Investigation of the formation of M{B:+}{O:2}-molecular ions in sputtering processes (1999)
VLEKKEN, Johan, CROES, Kristof, WU, Ting-Di, D' OLIESLAEGER, Marc, KNUYT, Gilbert, DE SCHEPPER, Luc, ...
Investigation of the formation of M-2(+)-molecular ions in sputtering processes (1999)
Wu, TD, Vandervorst, W, VLEKKEN, Johan, CROES, Kristof, D'OLIESLAEGER, Marc, KNUYT, Gilbert, ...
The formation process of M-2(+) molecular ions sputtered from elementary target materials is investigated. in a previous article it was shown that these molecules can be used to quantitate major...
Investigation of the formation of M{B:+}{O:2}-molecular ions in sputtering processes (1999)
VLEKKEN, Johan, CROES, Kristof, WU, Ting-Di, D' OLIESLAEGER, Marc, KNUYT, Gilbert, DE SCHEPPER, Luc, ...
Wu, TD, Vandervorst, W, VLEKKEN, Johan, D'OLIESLAEGER, Marc, KNUYT, Gilbert, DE SCHEPPER, Luc
A new quantitation method, based on the detection of M-2(+) molecular ions, is presented. It has been shown that M-2(+) molecular ions are formed by a recombination process between independently...
VLEKKEN, Johan, WU, Ting-Di, D' OLIESLAEGER, Marc, KNUYT, Gilbert, DE SCHEPPER, Luc, Vandervorst, W.
Towards an understanding of ion beam mixing by quantitative internal profiling: Cu in Si (1998)
WU, Ting-Di, D' OLIESLAEGER, Marc, Tian, C., Gomez, J., Beyer, G.P., De Bisschop, P., ...
VLEKKEN, Johan, WU, Ting-Di, D' OLIESLAEGER, Marc, KNUYT, Gilbert, DE SCHEPPER, Luc, Vandervorst, W.
Investigation of correlations between parameters defining the state of sputtered particles (1998)
VLEKKEN, Johan, CROES, Kristof, D' OLIESLAEGER, Marc, KNUYT, Gilbert, DE SCHEPPER, Luc, Vandervorst, W.
Wu, TD, Vandervorst, W, VLEKKEN, Johan, D'OLIESLAEGER, Marc, KNUYT, Gilbert, DE SCHEPPER, Luc
A new quantitation method, based on the detection of M-2(+) molecular ions, is presented. It has been shown that M-2(+) molecular ions are formed by a recombination process between independently...
VLEKKEN, Johan, WU, Ting-Di, D' OLIESLAEGER, Marc, KNUYT, Gilbert, DE SCHEPPER, Luc, Vandervorst, W.
Towards an understanding of ion beam mixing by quantitative internal profiling: Cu in Si (1998)
WU, Ting-Di, D' OLIESLAEGER, Marc, Tian, C., Gomez, J., Beyer, G.P., De Bisschop, P., ...
VLEKKEN, Johan, WU, Ting-Di, D' OLIESLAEGER, Marc, KNUYT, Gilbert, DE SCHEPPER, Luc, Vandervorst, W.
Investigation of correlations between parameters defining the state of sputtered particles (1998)
VLEKKEN, Johan, CROES, Kristof, D' OLIESLAEGER, Marc, KNUYT, Gilbert, DE SCHEPPER, Luc, Vandervorst, W.