Properties of Si-SiO2 interface traps due to low-energy Ar+ backsurface bombardment in n-channel nitrided MOSFETs (1996)
Surya, C,
Wong, W,
Fong, WK,
Chan, CH,
Lai, PT
Flicker noise in backsurface gettered, nitrided n-channel MOSFETs is characterized over a wide range of temperatures and biases. The gettering time ranged from from 10 to 40 minutes. The noise power...