Status of high-index materials for Generation-three 193nm immersion lithography (2007)
Zimmerman, PA, Van Peski, C, Rice, B, Byers, J, Turro, NJ, Lei, X, ...
Generation-three (Gen-3) immersion lithography can be an enabler for the 32nm half-pitch node. For Gen-3 lithography to be successful, however, there must be three major breakthroughs in materials...
Status of high-index materials for generation-three 193nm immersion lithography (2007)
Zimmerman, P.A., Van Peski, C., Rice, B., Byers, J., Turro, N.J., Lei, X., ...
Lei, X., Shimada, S., Intabon, K., Maekawa, T.
Rosana G. Moreira, Editor-in-Chief; Texas A&M University
Lei, X., Shimada, S., Intabon, K., Maekawa, T.
Rosana G. Moreira, Editor-in-Chief; Texas A&M University
Lei, X., Sugiura, N., Maekawa, T.
Rosana G. Moreira, Editor-in-Chief; Texas A&M University
Lei, X., Sugiura, N., Maekawa, T.
Rosana G. Moreira, Editor-in-Chief; Texas A&M University
CIGR E-Journal Volume 8 (2006)
Abubakar, M., Adams, R., Ademosun, C., Ademosun, O., Adewole, N., Adewumi, B., ...
Rosana G. Moreira, Editor-in-Chief; Texas A&M University
CIGR E-Journal Volume 8 (2006)
Abubakar, M., Adams, R., Ademosun, C., Ademosun, O., Adewole, N., Adewumi, B., ...
Rosana G. Moreira, Editor-in-Chief; Texas A&M University
S Karekal, X Lei, K Kusunose, T Satoh, O Nishizawa
A series of laboratory experiments were carried out in recent years to investigate the deformation and failure behaviour of some of the intact and jointed rocks of the deep mines of Kolar Gold...
S Karekal, X Lei, K Kusunose, T Satoh, O Nishizawa
A series of laboratory experiments were carried out in recent years to investigate the deformation and failure behaviour of some of the intact and jointed rocks of the deep mines of Kolar Gold...